Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity

摘要

A micro-bimorph cantilever is monolithically integrated with a photonic crystal micro-cavity based device, using surface micro-machining techniques. The integrated cantilever is equipped with self-aligned dielectric tips with respect to the holes of the photonic crystal and on electrostatic actuation, the tips move into the holes, providing electro-opto-mechanical modulation of guided waves. The device is designed to operate in the C-band of the telecommunication wavelengths and constitute a promising candidate for future integrated optical devices.