Localized strain sensing using high spatial resolution, highly-sensitive MEMS resonant strain gauges for failure prevention

摘要

Experimental measurements of the first-ever MEMS double ended tuning fork (DETF) resonant strain gauge, successfully bonded to steel by rapid inductive heating are presented in this paper. The localized strain-sensing results are compared with a finite element model. With a gauge length of just 200µm, the MEMS strain gauge enables higher spatial resolution and improved localized strain detection in comparison with commonly used metal-foil strain gauges, which average strain measurement over the entire metal-foil area. This sensing improvement enables the accurate detection of localized strains and may help improve crack propagation detection, and prevent catastrophic failures in structural elements.