Multifunctional optical MEMS sensor platform for wireless optical sensor networks

摘要

This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2″ × 1.5″. To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).