Study on Fabrication of Electrothermally Actuated Microgripper

摘要

In the work presented in this article a compliant nickel electro-thermal microgripper was designed using topology optimization and a fabrication process for the high aspect ratio metal microgripper has been developed using UV-LIGA technology with photoresist EPON SU-8. An electro-thermal microgripper with the smallest feature size of 10μm and thickness of 40μm and low internal stress was gained. Final dynamic performance of the nickel microgripper was experimented within 0v ～ 2.5v range. The tweezing displacement of up to 67μm at 2.5v was recorded. Characterized structures behaved in accordance with the intended behaviors.