Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

摘要

Metal containing amorphous hydrocarbon films (Me-C:H) with metal contents below 30 at % are characterized by their good wear resistance combined with low friction coefficients. These properties predestinate them for use in various tribological systems. With dc magnetron sputter techniques high deposition rates for Me-C:H coatings are attainable in conjunction with substrate temperatures below 200 °C. Me-C:H coatings were prepared in two large-scale batch coaters with two respectively four targets as well on industrial components as on test samples. For different target materials as titanium, tungsten and tungsten carbide the influence of the coatings metal content on its tribologically relevant properties as adhesion, wear and friction coefficient was investigated. The optimum of these properties can only be attained by using defined processes adapted to the respective target material in a narrow interval of metal content. Moreover, the coatings performed with titanium, tungsten and tungsten carbide targets show significant differences with regard to adhesion on steel as well as to their wear and friction behaviour.