An experimental study and modeling of the thickness distribution in pulsed laser deposited ferroelectric thin films

摘要

We present a systematic experimental study of the thickness profiles and the growth rates of ferroelectric lead zirconium titanate (PZT) thin films, formed by pulsed laser deposition, both in vacuum and in an oxygen ambient. The results are explained in terms of the adiabatic expansion model for the laser generated plasma plume.