A COMSOL Approach to Analysis Cantilever Displacement For Gas Sensing

摘要

This paper presents a displacement study of different shapes of the micro-cantilever based gas sensor for the measurement of gases. Various gas sensors are commercially available in the market, each with their own merits and demerits. MEMS sensors provide ruggedness and compact along with prolonging durability. Hence the design of a micro cantilever beam coated with sensitive material as an active layer to detect and measure the concentration of gases. Different structure for the cantilever beam is discussed and the best one is selected based on displacement due to deposited mass. The simulation results of applied force and displacement are given. The different design of the cantilever beam and simulation were done using COMSOL Multiphysics 5.4. The model is designed and simulated to find the respective displacement for applied pressure. The simulation is repeated by varying the structure with the same dimensions. Deflection is observed and tabulated to select the optimum structure for the high sensitivity of the gas sensor.