Design and elaboration of 1D photonic crystal cavity based on highly flexible elastomer thin layer for sensors applications

摘要

We report a new design for realizing a 1D Photonic crystal cavity based on highly flexible thin elastomer that enables a tuning of its resonance frequency by applying pressure, mechanical or thermal stress. The design consists of a Solaris thin film elastomer layer sandwiched between two Bragg reflectors composed of six bilayers (SiOx/SiNx). The structure exhibits a cavity resonance in wavelength band [500nm-1μm]. The wavelength can be reversible tuned over 2nm/Bar and 4000ppm/°C. These reconfigurable structure could find potential applications for integrated photonics mechanical sensors.