Optical Properties of TiO2 Zigzag Films Prepared by Using Oblique Angle Deposition

摘要

We present the optical properties of TiO2 films with a zigzag structure fabricated by using an oblique angle deposition (OAD) technique. Two fixed orientations of the substrate, 90?different from each other, were used during the deposition. At each orientation, the zigzag structure of the TiO2 film was fabricated at an oblique angle of 60?for the first half of the deposition and -60?for the second half. The in-plane birefringence of the TiO2 zigzag films deposited on glass substrate at the two different orientations was determined. For both orientations, the in-plane birefringence was found to be almost the same in magnitude, but opposite in sign. As an application, quarter-wave plates of zigzag structures were fabricated by using the OAD technique for both orientations of the substrate.