首页> 外国专利> PREPARATION METHOD OF WIRE GRID POLARIZER USING OBLIQUE ANGLE DEPOSITION AND WIRE GRID POLARIZER PREPARED THEREBY

PREPARATION METHOD OF WIRE GRID POLARIZER USING OBLIQUE ANGLE DEPOSITION AND WIRE GRID POLARIZER PREPARED THEREBY

机译:斜角沉积制备线栅极化器的方法及由此制备的线栅极化器

摘要

The present invention relates to a method for manufacturing a linear polarizing element and a linear polarizing element manufactured thereby, the method can comprising: a substrate preparation step; a substrate installation step in which a substrate holder, formed at an upper portion on the inside of a thin film deposition device, is inclined by a predetermined inclination angle and the substrate is installed on the inclined substrate holder; and an oblique angle deposition step in which a rotary shaft, which is installed on the center of the substrate holder inclined by the predetermined inclination angle with the substrate installed thereon and is able to rotate around the center, is rotated by a predetermined rotation cycle, such that a deposition material may be deposited on the substrate to form a deposition thin film. Therefore, according to the method for manufacturing a linear polarizing element using oblique angle deposition and the linear polarizing element manufactured thereby, a linear polarizing element in the infrared light range can be manufactured only by means of deposition, rather than etching or other methods.
机译:线偏振元件的制造方法及线偏振元件的制造方法技术领域本发明涉及线偏振元件的制造方法及由此制造的线偏振元件。基板安装步骤,其中,将形成在薄膜沉积装置内部的上部的基板支架倾斜预定的倾斜角度,并将基板安装在倾斜的基板支架上。倾斜角沉积步骤,其中旋转轴以预定的旋转周期旋转,该旋转轴以其预定的倾斜角度倾斜地安装在该基板保持器的中心,并且其上安装的基板能够绕该中心旋转。使沉积材料可以沉积在基板上以形成沉积薄膜。因此,根据使用倾斜角沉积的线性偏振元件的制造方法和由此制造的线性偏振元件,仅通过沉积而不是蚀刻或其他方法就可以制造红外光范围内的线性偏振元件。

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