Fabrication of Pure-Perovskite-Phase Sm-Doped Pb(Mg_(1/3)Nb_(2/3))O_3-PbTiO_3 Epitaxial Thin Film on Si by Magnetron Sputter using Powder Target

摘要

The relaxor-based ferroelectric single crystal such as Pb(Mg_(1/3)Nb_(2/3))O_3-PbTiO_3 (PMN-PT) has attracted attention with a higher piezoelectricity beyond Pb(Zr,Ti)O_3 (PZT). Especially, Samarium-doped PMN-PT (Sm-PMN-PT) single crystal was recently reported to exhibit a world-leading high d_(33) value. This monocrystalline thin film with the pure-perovskite phase and ideal orientation is also expected to provide a giant piezoelectricity, and has a potential to create high-performance piezoelectric MEMS devices. However, the epitaxial growth of such a film with a thickness of a few micrometers for MEMS is generally uneasy due to the thermodynamics instability.