Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement

机译：基于机械拉伸强度测量的薄膜聚对二甲苯 - 金属聚氨酯装置分析

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This paper presents an FEM analysis and experiment of parylene-metal-parylene flexible substrate for implantable medical devices. Tensile strength measurement of the parylene-metal-parylene has been carried out and corresponding FEM modeling and simulation has been done to understand its mechanical behaviour. Besides, frequently encountered metal delamination on parylene substrate has been studied based on cohesive zone model of interface between the two materials.

机译：本文介绍了用于植入医疗装置的二甲基金属 - 聚对二甲苯柔性基材的有限元分析和实验。已经进行了聚对二甲苯 - 金属聚对二甲苯的拉伸强度测量，并进行了相应的有限元模拟和模拟以了解其机械行为。此外，已经基于两种材料之间的界面的粘性区模型研究了对二甲苯基质的经常遇到的金属分层。

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《Symposium on Design, Test, Integration amp;amp;amp;amp;amp;amp; Packaging of MEMS and MOEMS》|2019年|270p|共4页
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Seonho Seok; HyungDal Park; Wonsuk Choi; Ockchul Kim; Jinseok Kim;
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中图分类计算技术、计算机技术;
关键词
biomedical equipment; bioMEMS; delamination; finite element analysis; polymer films; tensile strength; thin film devices;

机译：生物医学设备;生物医学;分层;有限元分析;聚合物薄膜;拉伸强度;薄膜装置;

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专利

1. THERMAL CONDUCTIVITY MEASUREMENTS ON THIN FILMS BASED ON MICROMECHANICAL DEVICES [J] . Jansen E., Obermeier E. Journal of Micromechanics and Microengineering . 1996,第1期

机译：基于微机械装置的薄膜导热率测量
2. Application of FFT-Based Signal Analysis to Micro-Scratch Testing for Adhesion Strength Measurement of Thin Films and Measured Results Based on Different Measurement Parameters [J] . Noboru Kyouno, Daisuke Arai, Kyo Takeshita Journal of Adhesion Science and Technology: The International Journal of Theoredtical and Basic Aspects of Adhesion Science and Its Applications in All Areas of Technology . 2009,第16期

机译：基于FFT的信号分析在微划痕测试中薄膜粘合强度测量和基于不同测量参数的测量结果的应用
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机译：用于优化钙钛矿氧化物薄膜微波器件的无图案铁电薄膜测量
4. Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement [C] . Seonho Seok, HyungDal Park, Wonsuk Choi, Symposium on Design, Test, Integration Packaging of MEMS and MOEMS . 2019

机译：基于机械拉伸强度测量的薄膜聚对二甲苯-金属-聚对二甲苯装置分析
5. Spin polarization measurements and sensor applications in thin films and carbon nanotube-based devices. [D] . Sanders, Jeff T. 2006

机译：自旋极化测量和传感器在薄膜和基于碳纳米管的设备中的应用。
6. Characterization data of chitosan-based films: Antimicrobial activity thermal analysis elementary composition tensile strength and degree crystallinity [O] . Ana A. Escárcega-Galaz, Dalia I. Sánchez-Machado, Jaime López-Cervantes, 2018

机译：壳聚糖基薄膜的表征数据：抗菌活性热分析元素组成拉伸强度和结晶度
7. Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement [O] . Seonho Seok, HyungDal Park, Wonsuk Choi, 2019

机译：基于机械拉伸强度测量的薄膜聚对二甲苯 - 金属聚氨酯装置分析

Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement

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