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Mathematical Modeling of the Fabry-Pérot Interferometer Based on Silicon Plates for Application in Microfluid Devices

机译:基于硅板的Fabry-Péroot干涉仪在微流体装置中的应用数学建模

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Mathematical modeling of 4-x mirror Fabry - Perot interferometer was made in order to use as a sensor for determining the refractive index of a liquid. After comparing different materials, silicon was chosen as the main one. The properties of silicon wafers significantly expand the functions and capabilities of the sensor and. As a result of the simulation, sensitivity up to 1600 nm/ RU was obtained.
机译:制造了4-X镜像 - 珀罗 - 珀罗干涉仪的数学建模,以用作用于确定液体折射率的传感器。在比较不同的材料之后,选择硅作为主要的材料。硅晶片的特性显着扩展了传感器的功能和能力。由于模拟的结果,获得了高达1600nm / Ru的敏感性。

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