Isolating the ultra-precision machine from vibrating base is importance in engineering fields. And the vibration isolation system is applied to reduce transmission of vibratory forces to the machine or the foundation. With the development of the vibration control techniques and force actuator in industry, active vibration isolation provides very high vibration isolation performance. In this paper, the theory and practice of vibration isolation reducing vibration transmitted from vibrating base to sensitive equipment have been studied in the paper. And a Z-direction isolation system is designed and provided by using proportional-integral-derivative controller and piezoelectric element. The approach is validated using experimental data. Results show that this vibration cancellation system can get good performance to reduce the effect of unwanted vibration and disturbances.
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