A Broadband Electromagnetic Characterization of Ba_(0.7)Sr_(0.3)TiO_3 thin films on Coplanar Waveguide up to Microwave Frequencies

摘要

A method for determining the electromagnetic properties of Ba_(0.7)Sr_(0.3)TiO_3 (BST) thin films is presented in this paper. At first we introduce a broadband characterization method based on the extraction of the intrinsic properties of a substrate from the measurement of a kit composed of five coplanar waveguides and then we employed an accurate on wafer TRL calibration technique to measure the permittivity of the BST thin film.