Design and optimization of planar structure micro-hotplate

摘要

A new planar structure micro-hotplate is fabricated to simplify the manufacturing process of micro gas sensor and shows similar power consumption with the conventional stack one. Two new types of planar structure micro-hotplates are designed to uniform the temperature distribution on the sensitive film deposited on it and decrease the power consumption. As the result of the thermal analysis, the suspended planar structure is the most promising structure because of the homogeneous temperature distribution and the lower power consumption.