The Influence of Atmosphere on Electrical Transport Properties in Bilayer Graphene FET by CVD Methods

摘要

The desorption process for ambient atmosphere on electrical transport properties of bilayer graphene FET grown by CVD methods on SiCVSi substrate was investigated in room temperature. With increasing the vacuum time of the device underwent, we found that the voltage of Dirac point decreased, the mobility of hole (electron) increased and the charged impurity density decreased. The results suggest that the atmospheric adsorbates (mainly oxygen and water molecules) are strongly influence the electrical transport properties of graphene FET.