Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy

摘要

This paper presents an assembled comb-drive XYZ-microstage with large displacements and low hysteresis for the scanner of magnetic resonance force microscopy (MRFM) at cryogenic environment. The scanning XYZ-microstage with little affection to the thermal variation and magnetic fields is required. The comb-drive XYZ-microstage is assembled with an XY-microstage, Z-microstages and silicon base substrate, based on microassembly technology. For measurements, a sample of 1,1-Diphenyl-2-picrylhydrazyl radical (DPPH) is glued onto the assembled XYZ-microstage. As the setup components of the MRFM measurement, the scanning XYZ-microstage with DPPH sample, a sensitive cantilever with a small magenetic particle, a fiber-optic interferometer to detect the vibration of the cantilever and a radio frequency (RF) coil are installed into the vacuum chamber of MRFM. Finally, the vibration of the cantilever caused by magnetic force due to electron spin-resonance spectroscopy (ESR) can be detected through adjusting the magnetic field intensity of RF coil.