Effects on the Calibration of Instruments in Surface Metrology

摘要

Thanks to the improvements in manufacturing techniques, it is becoming more common to alter the functional performance of products by controlling the geometrical properties of technical surfaces. The required characterization of surfaces can be done by using different optical measurement techniques. In order to have reliable measurement results, one of the pre-requisite is the proper calibration of the instrument. Although new ideas, like 3D Siemens-Star are becoming available in surface metrology, complexity of optical measurement techniques makes it not easy to calibrate them. In this study, depending on the available guidelines, some effects on the calibration of optical measurement techniques are given.