Size-dependence of Elasticity of Phosphorus-doped Silicon Nano-plates

摘要

Elasticity of phosphorus (P)-doped silicon nano-plates has been investigated by a semi-continuum approach which captures the atomistic physics and retains the efficiency of continuum models. Young's modulus of silicon (001) nano-plates along [100] direction is obtained by the developed semi-continuum approach. The results show that P-doping has an effect on the elasticity of silicon nano-plates, especially with the variation of doping concentration. The model predicts that Young's moduli of P -doped silicon nano-plates are size-dependence.