Optical Field Probing in Photonic Structures by Atomic Force Microscopy combined with optical heterodyne detection

摘要

This article presents recent advances in scattering-type near field optical scanning microscopy used as a powerful characterization tool for integrated optics. By significant examples, it is shown that this specific probe microscopy based on an Atomic Force Microscope setup with optical heterodyne detection functionalities allows for in situ quantitative study of the complex field propagating in compact silicon on insulator photonic structures (single channel waveguides, MMI splitters and microdisk resonators).