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Resonant Sensors for Microfluidic Applications

机译:微流体应用的共振传感器

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摘要

In this work we present both resonators working at ambient conditions and their first application as a biological and physical sensor. Singly- and doubly-clamped resonators of different geometries were realized using active layers of silicon carbide and aluminum nitride. The resonators were excited by magneto-motive actuation. The quality factor reached 350 and 50000 in air and in vacuum (2-5*10{sup}(-5) mbar), respectively, which is sufficient for sensing applications in air. The resonance shift caused by mass loadings in the range of picograms and by single biological cells was measured at ambient conditions. Initial non-resonant measurements in liquids such as propanol were performed to investigate the possibility of viscosity measurements in small volumes such as microfluidic channels and droplets.
机译:在这项工作中,我们介绍了在环境条件下工作的谐振器及其作为生物和物理传感器的第一个应用。使用碳化硅和氮化铝的有源层实现不同几何形状的单个和双夹紧的谐振器。谐振器被磁动力致动激发。在空气中达到350和50000的质量因数,分别在真空(2-5×10 {Sup}(-5)毫巴)中,这足以用于在空气中传感应用。在环境条件下测量由皮科级和单一生物细胞范围内的质量载荷引起的共振移位。进行诸如丙醇的液体中的初始非共振测量以研究小体积(如微流体通道和液滴)的粘度测量的可能性。

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