The fabrication of patterned metallic master by photolithography and electroplating technique for making PDMS-stamp as a tool for drug delivery system preparation

摘要

In this work,the micropatterned(Ni micropillars)masters were fabricated by combination of photolithography and electroplating technique.The polydimethylsiloxane(PDMS)stamps were successfully made by casting technique on micropatterned masters and used for further preparation of polymeric microchamber arrays film considered to be a drug delivery system.Micropatterned master fabrication is more precise technique,which is necessary for defects elimination.