The Distribution Trend of Boron Atoms in Semiconductor Silicon under High Temperature

摘要

The ProENGINEER software is used to build a geometric model for the whole process cavity and internal structure and conduct the internal dynamic simulation of cavity with different diffusion temperatures of 1,000°C, 1,050°C, 1,100°C and 1,150°C, and different diffusion time of 5 min, 10 min, 15 min and 20 min. Analyze the process control indexes by combining with specific thermal diffusion test, and study the relationship between hydrodynamic parameters and diffusion uniformity, Comprehensively investigate the effects of the diffusion temperature and diffusion time on doping, achieving the requirements of impurity distribution in materials.