Multi-channel scanning measuring system for testing of diffractive structures and thin transparent films

摘要

The development of specialized non-destructive methods for monitoring of microstructured optical elements is necessaryfor introduction of diffractive, micro-optical and conformal optical elements into production. However, a wide variety ofsuch elements, as well as their production technologies, set many tasks in the implementation of process control both atthe final and at the intermediate stages of the formation of a multilevel and binary phase element. All this requires the useof various expensive equipment, each of which individually does not allow solving the whole range of tasks. Multichannelscanning measuring system that implementing spectroscopic and diffraction testing methods was developed at IA&E SBRAS. The device includes four measuring channels allowing to measure the following parameters and characteristics:transmission function of half-tone masks in zeroth order or as sum of all diffraction orders; thickness of transparent filmscovered on substrate (by the spectroscopic method in reflection); measurement of the zero-order intensity of diffractionstructures, both in transmission and in reflection in range of wavelengths from 200 nm to 1100 nm; measurement of thediffraction efficiency of the first and zero orders of diffraction in reflected light (including for structures made in opticallytransparent materials) for monitoring the parameters of the formed relief of multilevel elements.