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Dry aerosol jet printing of conductive silver lines on a heated silicon substrate

机译:在加热的硅衬底上的导电银线的干燥气溶胶喷射印刷

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A new method for dry aerosol jet printing conductive lines on a heated substrate is presented. The method is based on the use of a spark discharge generator as a source of dry nanoparticles and a heating plate for their sintering. This method allows creating conductive silver lines on a heated silicon substrate up to 300 °C without an additional sintering step. It was found that for effective sintering lines of silver nanoparticles the temperature of the heated substrate should be about more than 200-250 °C. Average thickness of the sintered silver lines was equal to ~20 μm. Printed lines showed electrical resistivity equal to 35 μΩ·cm, which is 23 times greater than the resistivity of bulk silver.
机译:提出了一种加热衬底上的干气溶胶喷射印刷线的新方法。 该方法基于火花放电发生器作为干燥纳米颗粒的来源和用于其烧结的加热板。 该方法允许在加热的硅衬底上产生高达300℃的导电银线,而无需额外的烧结步骤。 发现,对于有效的银纳米颗粒的烧结线,加热基板的温度应为约200-250℃。 烧结银线的平均厚度等于〜20μm。 印刷线显示电阻率等于35μΩ·cm,比散装银电阻率大23倍。

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