Numerical Simulation of The Interaction Between Electromagnetic Wave and Plasma

摘要

With a view to the potential application on stealth design of inductively coupled plasma (ICP), the simulation model of ICP scattering parameters was established by using COM SOL and ZT-FDTD method. Some detail of the interaction between electromagnetic wave and plasma in time domain which was difficult to be observed in experiment was revealed in the simulation. Wave source points composed of continuous reflection waves in the plasma were observed. The position of the wave source depends on the spatial distribution of the electron density peak. The influence of gas pressure (10 mTorr~l Torr) and power (300-700 W) on attenuation efficiency was studied. The wave attenuation in plasma is characterized by band attenuation. The attenuation significantly improved with the increase of pressure and thickness monotonically. As the power increased, both the band width and amplitude of wave attenuation increased.