Influence of Surface Buffer Layer Thickness and Deposition Rate on the Release Rate of Silver Ions in Ag-TiO_x Nanocomposites

摘要

In this paper, different surface buffer layers (barrier layer) were deposited on Ag-TiO_2 2D and 3D structure of nanocomposite films by using magnetron sputtering, and the influence of different deposition conditions of buffer layers on silver ion release rate were investigated. The results showed that the buffer layer obtained at relative higher deposition rate (about 20 nm/min) had better inhibitory effect on the control of silver nano particle agglomeration on the surface of composite thin films and silver ion release rate, compared with the buffer layer produced at lower rate of deposition conditions (5 nm/min). Therefore, high rate deposition is the recommended condition for better composite film morphology and lower release rate of silver ions in the process of sputtering deposition of Ag-TiO_x nanocomposite films.