Analysis and Optimization of Performance Under Operating Condition of Thrust Aerostatic Bearing with Vacuum Pre-load

摘要

Thrust aerostatic bearing with vacuum pre-load (VPL pad) is used in high-precision application. In some cases, performance of bearing not only needs to be optimal, but also needs good stability. In this paper, a parameter called stiffness volatility is defined to represent stability of performance of VPL pad under operating condition. It shows that parameters such as vacuity, area ratio and positive pressure distinctly affect stiffness volatility of VPL pad. There is significant interaction between those effect factors. Through adjusting parameter combination, optimized performance of VPL pad under operating condition is obtained.