High Performance SWIR HgCdTe 320x256/30μm FPAs at Teledyne Judson Technologies

摘要

High performance short-wavelength infrared (SWIR) HgCdTe focal plane arrays (FPAs) of 320x256/30μm have been well developed and are now in production at Teledyne Judson Technologies (TJT). These FPAs have two cutoff wavelengths, 2.5μm and 2.9μm in general, and can operate over a wide temperature range. The detector arrays were fabricated primarily with molecular beam epitaxy (MBE) HgCdTe materials, although liquid phase epitaxy (LPE) materials were also used, both materials on CdZnTe substrates. These FPAs use ISC 9809 Si readout integrated circuit (ROIC) and have excellent operability, low dark current, high quantum efficiency (QE), good uniformity and high yield. Comprehensive characterization of FPA performance was performed from room temperature to LN2, and the test results are presented and discussed in this paper. Typical operability is ~99.9%, and peak QE ~85%. FPA noise is background limited at -70°C with field-of-view (FOV) ~100° and becomes lab camera electronics limited when FOV ~0°. Pixel dark current either matches or is below the values from Rule-07 model over a wide temperature range. Noise equivalent irradiance (NEI) of 2-3E9 Ph/cm~2-s is achieved at -70°C and could be further reduced under smaller FOV.