Surface Acoustic Wave Sensing Detection System for Chemical Warfare Agents

摘要

A novel chemical warfare agents (CWA) detection system comprising a CWA flowing gas generation system, a coated SAW resonator gas sensor and data proceeding was developed. The CWA flowing gas generation can supply varieties trace concentrations of CWA at ppm or ppb level, and easily switched between the toxic gas and clean air. A two-port surface acoustic wave (SAW) resonator sensors with a fundamental frequency at 200 MHz was fabricated. A thin SiO{sub}2 layer was used to protect the resonator, and then the sensitive coatings of the CWA were spin-coated on the surface of the resonators respectively. Such sensors not only kept the advantage of the SAW resonators such as low noise and high Q-value, but also had high sensitivity, good linearity and stability to CWA. It confirmed that the SAW resonator gas sensors were a promising sensor to be applied in the CWA detection and defense.