NANOINDENTATION AND OPTICAL PROPERTIES OF TRANSPARENT METAL OXIDE MULTILAYERS

摘要

Multilayers are a unique class of thin films and coatings comprised of alternating layers of different materials, with layers being anywhere from the macro to nanoscale. The interplay of these layers increases the potential for novel combinations of properties, including transparency and strength [1-3]. Optically transparent multilayers are promising materials because they offer extraordinary strength, hardness, heat resistance, and most importantly, transparency in both the UV-Vis and NIR wavelengths, which traditionally used silicate glass lacks [4]. These properties are important for applications such as sensor and telescope preservation, which require light penetration for function but a robust barrier for protection.