The Discussion of the further Studies of the Magnetic Suspension Vibration Isolator

摘要

The vibration isolators play an important role in the field of high resolution metrology and manufacturing, optical, physical and chemical experiments. Magnetic suspension vibration isolator (MSVI) is an efficient method to suppress the oscillations in vacuum environment. This paper firstly presents the requirements of the MSVI. Then, based on principle of the magnetic suspension, it introduces several types of the low frequency MSVI. Furthermore, the recent advanced investigations of the MSVI are reported such as magnetic force, eddy current damping effect, instability and the active control, etc. Finally, the author mainly discusses the future research contents of the MSVI and provides a new ideal for the development of the active MSVI. All of these will provide the research direction to develop the high performance of the MSVI.