Semi-automated high-efficiency reflectivity chamber for vacuum UV measurements

摘要

This paper presents the design and theory of operation for a semi-automated reflectivity chamber for ultraviolet optimized optics. A graphical user interface designed in LabVIEW controls the stages, interfaces with the detector system, takes semi-autonomous measurements, and monitors the system in case of error. Samples and an optical photodiode sit on an optics plate mounted to a rotation stage in the middle of the vacuum chamber. The optics plate rotates the samples and diode between an incident and reflected position to measure the absolute reflectivity of the samples at wavelengths limited by the monochromator operational bandpass of 70 nm to 550 nm. A collimating parabolic mirror on a fine steering tip-tilt motor enables beam steering for detector peak-ups. This chamber is designed to take measurements rapidly and with minimal oversight, increasing lab efficiency for high cadence and high accuracy vacuum UV reflectivity measurements.