Spatial light modulator (SLM) has various of applications in the field of imaging, beam shaping, adaptive optics and so on. While SLM is used as an aberration correction element in super-resolution microscopy, the surface flatness of SLM could affect the imaging performance of the system due to the higher sensitivity to aberrations of these kind microscopic techniques. In this paper, the optical surface flatness of SLM is measured experimentally by employing the image plane digital holography. The topography of SLM is retrieved from the captured hologram. Aiming to the application of SLM as an adaptive correction element in super resolution microscopy, the aberrations introduced by the surface flatness of SLM are further evaluated and corrected in the same optical system.
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