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Fabrication of micro-optical components using femtosecond oscillator pulses

机译:使用飞秒振荡脉冲的微光学部件的制造

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With a penchant for integrated photonics and miniaturization, the fabrication of micron sized optical elements using precision laser pulse management is drawing attention due to the possibility of minimizing tolerances for collateral material damage. The work presented here deals with the design, fabrication and characterization of a range of diffractive optics - gratings, grids and Fresnel zone plates - on transparent and metallic samples. Their low volume, light weight, transmission bandwidth, high damage threshold and flexible design make them suited for replacing conventional refractive optical elements. Our one-step, mask-less, 3-D laser direct writing process is a green fabrication technique which is in stark contrast to currently popular Photo-lithography based micro-structuring. Our method provides scope for modifications on the surface as well as within the bulk of the material. The mechanism involved in the fabrication of these optics on transparent and thin metallic substrates differ from each other. Our studies show that both amplitude and phase versions of micro-structures were achieved successfully with performances bearing ~98% accuracy vis-a-vis theoretical expectations.
机译:对于集成光子和小型化的密集,使用精密激光脉冲管理的微米尺寸光学元件的制造是由于最小化侧支材料损坏的公差可能的可能性。这里提出的工作涉及一系列衍射光学 - 光栅,网格和菲涅耳区板的设计,制造和表征 - 透明和金属样品。它们的低体积,重量轻,传动带宽,高损伤阈值和柔性设计使其适用于更换传统的折射光学元件。我们的一步,面罩较少,3-D激光直接写入过程是一种绿色制造技术,其与目前流行的基于光版的微结构形成的鲜明对比。我们的方法提供了表面上的修改以及大部分材料的范围。在透明和薄金属基板上制造这些光学器件的制造机制彼此不同。我们的研究表明,微结构的两个幅度和相位版本都成功地实现了轴承〜98%的准确性Vis-A-Vis的理论期望。

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