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Fabrication of micro-optical components using femtosecond oscillator pulses

机译:使用飞秒振荡器脉冲制造微光学组件

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With a penchant for integrated photonics and miniaturization, the fabrication of micron sized optical elements using precision laser pulse management is drawing attention due to the possibility of minimizing tolerances for collateral material damage. The work presented here deals with the design, fabrication and characterization of a range of diffractive optics - gratings, grids and Fresnel zone plates - on transparent and metallic samples. Their low volume, light weight, transmission bandwidth, high damage threshold and flexible design make them suited for replacing conventional refractive optical elements. Our one-step, mask-less, 3-D laser direct writing process is a green fabrication technique which is in stark contrast to currently popular Photo-lithography based micro-structuring. Our method provides scope for modifications on the surface as well as within the bulk of the material. The mechanism involved in the fabrication of these optics on transparent and thin metallic substrates differ from each other. Our studies show that both amplitude and phase versions of micro-structures were achieved successfully with performances bearing ~98% accuracy vis-a-vis theoretical expectations.
机译:由于对集成光子学和小型化的追求,使用精确激光脉冲管理的微米级光学元件的制造引起了人们的注意,因为它有可能使对附带材料的损害的容限最小化。本文介绍的工作涉及在透明和金属样品上设计,制造和表征一系列衍射光学器件-光栅,栅格和菲涅耳波带片。它们体积小,重量轻,传输带宽,损伤阈值高以及灵活的设计使其适合替代传统的折射光学元件。我们的一步式无掩模3-D激光直接写入工艺是一种绿色制造技术,与当前流行的基于光刻的微结构形成鲜明对比。我们的方法为材料的表面以及大部分材料提供了修改的范围。在透明和薄金属基板上制造这些光学器件的机制彼此不同。我们的研究表明,微结构的振幅和相位都可以成功实现,其性能相对于理论预期的精度约为98%。

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