Pulsed abnormal glow discharge with hollow cathode for nitriding of internal cylindrical surfaces

摘要

Possibility of nitriding of internal cylindrical surfaces in plasma of abnormal glow discharge with hollow cathode in the pulse-periodic mode in N_2+H_2 was investigated. Tubes with internal diameters of 6, 8, and 9 mm and with the aspect ratio from 12 to 50 were made a low carbon steel were used. Regimes of the discharge were investigated. Nitrided layers in different parts of the tubes were analyzed.