Soft magnetic multilayered thin films for HF applications

摘要

Multilayered thin films from various soft magnetic materials were successfully prepared by magnetron sputtering in Ar atmosphere. The magnetic properties and microstructure were investigated. It is found that the films show good soft magnetic properties: magnetic coercivity of 1-100e and saturation magnetization higher than IT. The initial permeability of the films is greater than 300 and flattens up to 600MHz. The multilayer thin film properties in combination with their easy, fast and reproducible fabrication indicate that they are potential candidates for high frequency applications.