The work is devoted to the effect of VUV radiation of excimer lamps (λ = 172 nm) on the spores of various species of microscopic fungi. The dependences of the spores survival probability have been obtained. It was found that the survival probability is dependent on the relative size and cell wall thickness, which, in turn, determined by the type and age of spores. FTIR spectra indicate that the VUV radiation leads to degradation of proteins and polysaccharides. Atomic force microscopy indicates the photochemical nature of the spore inactivation.
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