Influence of Ti ions implantation on the metallization of quartz glass

摘要

Titanium ions were implanted into quartz glass with the ion source implanter by MEVVA (Metal Vapour Vacuum Arc) before the metallization of quartz glass. The bond strength of interfacial adhesion between thin coating and substrate was examined by the scratch method. The results show that the implanted titanium ions could improve the bond strength between thin coating and quartz substrate.