GLASS SUBSTRATE WITH Ti FILM AND GLASS SUBSTRATE WITH METAL FILM USING THE SAME, PRODUCTION METHOD OF GLASS SUBSTRATE WITH Ti FILM AND GLASS SUBSTRATE WITH METAL FILM USING THE SAME, AND FLATNESS DEGREE EVALUATION METHOD OF GLASS SUBSTRATE SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate with a Ti film in which, when a metal film is accumulated on the glass substrate through the Ti film, growth of a hillock associated with heat treatment hardly occurs.;SOLUTION: A glass substrate 1 with a Ti film includes: a glass substrate 2 in which the Ti film containing Ti as a main component and having a thickness of 10-100 nm is formed on a surface, and a half value width of a Ti(002) peak measured by an X-ray diffraction of the Ti film using a rocking curve method when an X ray is irradiated to the Ti film is at most 8°; and the Ti film 3 formed by sputtering on the glass substrate 2.;COPYRIGHT: (C)2014,JPO&INPIT