Preparation of Vanadium Dioxide Thin Films with Adjustable Electric Field Intensity Transition Point

摘要

Preparation of phase change electric field adjustable vanadium dioxide thin films on Al_2O_3 ceramic substrates by inorganic sol - gel method and vacuum annealing process. By changing the annealing process to adjust the proportion of vanadium dioxide in the film to achieve changes in its phase change electric field threshold. And It had been found that the electric field intensity transformation point was reduced from 1.8MV/M to 0.4 MV/M and Phase change electric field strength decreased by about 4 times. It has also been found that the resistance abrupt multiplier decreased as the field phase change point decreased and the change range of the phase change was 2 × 10~3 ～ 1 × 10~2.