Research of error detection and compensation of CNC machine tools based on laser interferometer

摘要

Taking a certain type of precision ultra-precision CNC grinding machine as an experimental platform, the research uses Renishaw XL-80 laser interferometer in testing the machine tools positional accuracy and repeat positioning accuracy in the before and after position of error compensation. Through the establishment of deviation mathematical model with VDI standard, the paper uses the Matlab powerful data analysis functions to calculate machine movement error value and draws the error distribution curve. Using the error compensation mechanism of FANUC system for pitch compensation and backlash compensation, so that the machine tools meet the requirements of precision ultra-precision machining accuracy.