Gravity induced deflection of a reference plate and tested plane surfaces and its influence on optical measurement with the Fizeau interferometer

摘要

The paper presents an analysis of deflection of a reference plate and a tested plane parallel plate due to gravity during measurement with the Fizeau interferometer. Detailed expressions for the calculation of a deflection assuming different supports are presented. Furthermore, the relations for the calculation of a minimum thickness of a reference plate of the interferometer ensuring the required accuracy of measurement are given as well.