We have developed organometallic carboxylate compounds [R_nM(O_2CR')_2] capable of acting as negative-tone EUV resists. Overall, the best and fastest resists contain antimony, are pentavalent and the carboxylate group contains a polymerizable olefin (e.g. acrylate, methacrylate or styrenecarboxylate). Evidence suggests that high sensitivity is achieved through the polymerization of olefins in the exposed region. We have performed a systematic sensitivity study of molecules of the type R_nM(O_2CR')_2 where we have studied seven R groups, four main group metals (M), and three polymerizable carboxylate groups (O_2CR'). We found that the greatest predictor of sensitivity of the R_nSb(O_2CR')_2 resists is their level of polymerizable olefins. We mathematically define the polymerizable olefin loading (POL) as the ratio of the number of olefins vs. the number of non-hydrogen atoms. Linear and log plots of E_(max) vs. POL for a variety of molecules of the type R_3Sb(O_2CR')_2 lend insight into the behaviour of these resists.
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机译：我们开发了有机金属羧酸盐化合物[r_nm（O_2cr'）_ 2]，其能够作为负色调EUV抗蚀剂作用。总体而言，最佳和最快的抗蚀剂含有锑，是五价，羧酸盐基团含有可聚合的烯烃（例如丙烯酸酯，甲基丙烯酸酯或苯乙烯羧酸丁酯）。证据表明，通过在暴露区域中的烯烃的聚合来实现高灵敏度。我们已经对R_NM（O_2CR'）_ 2的分子进行了系统敏感性研究，其中我们研究了七个R基团，四个主要群金属（M）和三种可聚合羧酸盐基团（O_2CR'）。我们发现R_NSB（O_2CR'）_ 2抗蚀剂的最大预测因子是它们的可聚合烯烃水平。我们数学地将可聚合烯烃负载（POL）定义为烯烃数量与非氢原子的数量的比率。 e_（max）的线性和日志图与r_3sb类型的各种分子的e_（max）与pol of of in洞察这些抗蚀剂的行为。
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