High-quality slot waveguide ring resonator based on atomic layer deposition

摘要

Slot waveguide based ring resonators filled with atomic layer deposited (ALD) aluminum oxide (Al_2O_3) were fabricated and characterized. Our results demonstrate that ALD can be used to create slot waveguide ring resonators with relatively high Q-factors, which opens new possibilities for various photonic applications, such as optical sensing and all-optical signal processing.