Inkjet printing enabling silicon photonics

摘要

In this paper, a concave on-chip silicon-based optical microcavity was designed and fabricated. The optical modes of the optical microcavity were measured by optical fiber system. The quality factor is demonstrated as high as 2850. The structure is an open access system, which can easily be combined with the inkjet print technology to have the applications in biosensors and on-chip light sources. Inkjet print technology is suggested as an important complementary method for micro-electro-mechanical systems.