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Structural, Optical and Electrical Properties of Tin Oxide Thin Films for Application as a Wide Band Gap Semiconductor

机译:锡氧化锡薄膜的结构,光学和电性能作为宽带隙半导体的应用

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Tin oxide (SnO) thin films were synthesized using thermal evaporation technique. Ultra pure metallic tin was deposited on glass substrates using thermal evaporator under high vacuum. The thickness of the tin deposited films was kept at 100nm. Subsequently, the as-deposited tin films were annealed under oxygen environment for a period of 3hrs to obtain tin oxide films. To analyse the suitability of the synthesized tin oxide films as a wide band gap semiconductor, various properties were studied. Structural parameters were studied using XRD and SEM-EDX. The optical properties were studied using UV-Vis Spectrophotometry and the electrical parameters were calculated using the Hall-setup. XRD and SEM confirmed the formation of SnO phase. Uniform texture of the film can be seen through the SEM images. Presence of traces of unoxidised Sn has also been confirmed through the XRD spectra. The band gap calculated was around 3.6eV and the optical transparency around 50%. The higher value of band gap and lower value of optical transparency can be attributed to the presence of unoxidised Sn. The values of resistivity and mobility as measured by the Hall setup were 78Ωcm and 2.92cm~2/Vs respectively. The reasonable optical and electrical parameters make SnO a suitable candidate for optoelectronic and electronic device applications.
机译:使用热蒸发技术合成氧化锡(SnO)薄膜。在高真空下使用热蒸发器沉积超纯金属锡在玻璃基板上。将锡沉积的薄膜的厚度保持在100nm。随后,将沉积的锡膜在氧环境下退火3小时以获得氧化锡膜。为了分析合成的氧化锡膜作为宽带隙半导体的适用性,研究了各种性质。使用XRD和SEM-EDX研究了结构参数。使用UV-Vis分光光度法研究光学性质,并使用霍尔设置计算电参数。 XRD和SEM证实了Sno阶段的形成。通过SEM图像可以看到膜的均匀纹理。还通过XRD光谱确认了无氧化Sn的痕量。计算的带隙约为3.6EV,光学透明度约为50%。带隙的较高值和较低的光学透明度值可归因于存在不氧化的Sn。大厅设置测量的电阻率和移动性的值分别为78Ωcm和2.92cm〜2 / vs。合理的光学和电气参数使SNO成为光电和电子设备应用的合适候选者。

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