Axis Cross-Coupling Reduction on a High Bandwidth XY Flexure Stage

摘要

Flexure stages are widely used in the field of micro and nanopositioning because of their repeatability and precision, which is due to the lack of joints that induces uncertainty. In the present Twork, a XY flexure stage has been analyzed and redesigned to reduce the axis cross-coupling, which is due to a parasitic motion in the amplification stage of the mechanism. The performed modifications result in a high reduction of the undesired motion, while maintaining a similar amplification and natural frequencies. The main advantage of the redesign is that the cross-coupling reduction is achieved mechanically, instead of using the position control loops.